JPH0216937U - - Google Patents

Info

Publication number
JPH0216937U
JPH0216937U JP9464088U JP9464088U JPH0216937U JP H0216937 U JPH0216937 U JP H0216937U JP 9464088 U JP9464088 U JP 9464088U JP 9464088 U JP9464088 U JP 9464088U JP H0216937 U JPH0216937 U JP H0216937U
Authority
JP
Japan
Prior art keywords
plenum
ceiling
room
supply plenum
return
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9464088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648256Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988094640U priority Critical patent/JPH0648256Y2/ja
Publication of JPH0216937U publication Critical patent/JPH0216937U/ja
Application granted granted Critical
Publication of JPH0648256Y2 publication Critical patent/JPH0648256Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Central Air Conditioning (AREA)
JP1988094640U 1988-07-19 1988-07-19 クリーンルーム Expired - Lifetime JPH0648256Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988094640U JPH0648256Y2 (ja) 1988-07-19 1988-07-19 クリーンルーム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988094640U JPH0648256Y2 (ja) 1988-07-19 1988-07-19 クリーンルーム

Publications (2)

Publication Number Publication Date
JPH0216937U true JPH0216937U (en]) 1990-02-02
JPH0648256Y2 JPH0648256Y2 (ja) 1994-12-12

Family

ID=31319201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988094640U Expired - Lifetime JPH0648256Y2 (ja) 1988-07-19 1988-07-19 クリーンルーム

Country Status (1)

Country Link
JP (1) JPH0648256Y2 (en])

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04113136A (ja) * 1990-09-03 1992-04-14 Takasago Thermal Eng Co Ltd 直膨型熱交換器を用いたクリーンルーム
JPH04174235A (ja) * 1990-11-05 1992-06-22 Takasago Thermal Eng Co Ltd 直膨型熱交換器を用いたクリーンルーム
JPH05196258A (ja) * 1991-10-03 1993-08-06 Hitachi Metals Ltd 空気調和設備
JPH08152159A (ja) * 1994-11-28 1996-06-11 Shimizu Corp 全面床吹出し方式空調設備
JPH08159515A (ja) * 1994-11-30 1996-06-21 Advantest Corp Ｉｃテスタ用冷却装置
JPH08261531A (ja) * 1995-03-27 1996-10-11 Toyo Netsu Kogyo Kk クリーンルームシステム
JPH0914713A (ja) * 1995-06-27 1997-01-17 Shimizu Corp クリーンルームにおける空気処理装置
JPH1163577A (ja) * 1997-08-14 1999-03-05 Takasago Thermal Eng Co Ltd クリーンルーム用局所冷却装置
JPH11304192A (ja) * 1998-04-22 1999-11-05 Tokyo Gas Co Ltd 換気・空調システム
JPH11344242A (ja) * 1998-06-02 1999-12-14 Taisei Corp クリーンルームにおける空調システム
JP2000279741A (ja) * 1999-03-26 2000-10-10 Takasago Thermal Eng Co Ltd 空気浄化空調装置及び空気浄化空調方法
JP2001263747A (ja) * 2000-03-21 2001-09-26 Takenaka Komuten Co Ltd クリーンルーム
JP2002156137A (ja) * 2000-11-17 2002-05-31 Takasago Thermal Eng Co Ltd 空調用加湿設備
JP2004293933A (ja) * 2003-03-27 2004-10-21 Sanki Eng Co Ltd ドライコイルおよびその設置方法
JP2015206519A (ja) * 2014-04-18 2015-11-19 株式会社竹中工務店 空調システム
JP2017219219A (ja) * 2016-06-06 2017-12-14 清水建設株式会社 クリーンルーム用空調システム

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1089724A (ja) * 1996-09-10 1998-04-10 Taikisha Ltd 空調設備

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176837A (ja) * 1984-09-22 1986-04-19 Shinko Kogyo Kk 清浄作業室
JPS6475833A (en) * 1987-09-14 1989-03-22 Takenaka Komuten Co Locally circulated type clean room

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176837A (ja) * 1984-09-22 1986-04-19 Shinko Kogyo Kk 清浄作業室
JPS6475833A (en) * 1987-09-14 1989-03-22 Takenaka Komuten Co Locally circulated type clean room

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04113136A (ja) * 1990-09-03 1992-04-14 Takasago Thermal Eng Co Ltd 直膨型熱交換器を用いたクリーンルーム
JPH04174235A (ja) * 1990-11-05 1992-06-22 Takasago Thermal Eng Co Ltd 直膨型熱交換器を用いたクリーンルーム
JPH05196258A (ja) * 1991-10-03 1993-08-06 Hitachi Metals Ltd 空気調和設備
JPH08152159A (ja) * 1994-11-28 1996-06-11 Shimizu Corp 全面床吹出し方式空調設備
JPH08159515A (ja) * 1994-11-30 1996-06-21 Advantest Corp Ｉｃテスタ用冷却装置
JPH08261531A (ja) * 1995-03-27 1996-10-11 Toyo Netsu Kogyo Kk クリーンルームシステム
JPH0914713A (ja) * 1995-06-27 1997-01-17 Shimizu Corp クリーンルームにおける空気処理装置
JPH1163577A (ja) * 1997-08-14 1999-03-05 Takasago Thermal Eng Co Ltd クリーンルーム用局所冷却装置
JPH11304192A (ja) * 1998-04-22 1999-11-05 Tokyo Gas Co Ltd 換気・空調システム
JPH11344242A (ja) * 1998-06-02 1999-12-14 Taisei Corp クリーンルームにおける空調システム
JP2000279741A (ja) * 1999-03-26 2000-10-10 Takasago Thermal Eng Co Ltd 空気浄化空調装置及び空気浄化空調方法
JP2001263747A (ja) * 2000-03-21 2001-09-26 Takenaka Komuten Co Ltd クリーンルーム
JP2002156137A (ja) * 2000-11-17 2002-05-31 Takasago Thermal Eng Co Ltd 空調用加湿設備
JP2004293933A (ja) * 2003-03-27 2004-10-21 Sanki Eng Co Ltd ドライコイルおよびその設置方法
JP2015206519A (ja) * 2014-04-18 2015-11-19 株式会社竹中工務店 空調システム
JP2017219219A (ja) * 2016-06-06 2017-12-14 清水建設株式会社 クリーンルーム用空調システム

Also Published As

Publication number Publication date
JPH0648256Y2 (ja) 1994-12-12

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